MEMS electric-field sensor with lead zirconate titanate (PZT)-actuated electrodes

S Ghionea, G Smith, J Pulskamp, S Bedair… - SENSORS, 2013 …, 2013 - ieeexplore.ieee.org
S Ghionea, G Smith, J Pulskamp, S Bedair, C Meyer, D Hull
SENSORS, 2013 IEEE, 2013ieeexplore.ieee.org
A microelectromechanical system (MEMS) electric-field sensor (EFS) is presented in which
the ambient electric field (E-Field) is modulated by vertical electrode displacement using
lead-zirconate-titanate (PZT) piezoelectric actuators. The device is fabricated with a multi-
layer copper-on-PZT process, which enables large (~ 10 μm) displacement and high aspect
ratio electrode structures as needed for sensitive detection. The modulated displacement
current between two electrodes, measured using a transimpedance amplifier, is proportional …
A microelectromechanical system (MEMS) electric-field sensor (EFS) is presented in which the ambient electric field (E-Field) is modulated by vertical electrode displacement using lead-zirconate-titanate (PZT) piezoelectric actuators. The device is fabricated with a multi-layer copper-on-PZT process, which enables large (~10 μm) displacement and high aspect ratio electrode structures as needed for sensitive detection. The modulated displacement current between two electrodes, measured using a transimpedance amplifier, is proportional to the ambient, sensed E-Field. Fabricated EFS devices yielded a responsivity of 830 fA/(V/m) and a limit of detection down to 0.19 V/m/rtHz in vacuum (0.30 V/m/rtHz in air) with a 491-Hz E-field applied.
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