the ambient electric field (E-Field) is modulated by vertical electrode displacement using
lead-zirconate-titanate (PZT) piezoelectric actuators. The device is fabricated with a multi-
layer copper-on-PZT process, which enables large (~ 10 μm) displacement and high aspect
ratio electrode structures as needed for sensitive detection. The modulated displacement
current between two electrodes, measured using a transimpedance amplifier, is proportional …