Method of patterning of magnetic tunnel junctions
O Joubert, B Schwarz, JGM Pereira… - US Patent …, 2013 - Google Patents
… Embodiments described herein generally relate to methods for patterning a magnetic
stack (eg, a magnetic tunnel junction (MTJ)) by exposing the magnetic stack to an oxidizer-free
gas mixture comprising a hydrogen containing gas to remove at least a portion of the
magnetic stack. … It has been found that patterning a magnetic tunnel junction with an
oxidizer-free gas mixture comprising hydrogen maintains the integrity of the magnetic tunnel
junction without producing harmful conductive residue. … It has been found that patterning …
stack (eg, a magnetic tunnel junction (MTJ)) by exposing the magnetic stack to an oxidizer-free
gas mixture comprising a hydrogen containing gas to remove at least a portion of the
magnetic stack. … It has been found that patterning a magnetic tunnel junction with an
oxidizer-free gas mixture comprising hydrogen maintains the integrity of the magnetic tunnel
junction without producing harmful conductive residue. … It has been found that patterning …
[引用][C] Method of patterning of magnetic tunnel junctions
O Joubert, B Schwarz, J Pereira, K Menguelti, E Pargon… - 2013 - hal.univ-grenoble-alpes.fr
Method of patterning of magnetic tunnel junctions - Université Grenoble Alpes …
以上显示的是最相近的搜索结果。 查看全部搜索结果