[PDF][PDF] Microelectromechanical components for articulated microrobots
R Yeh, EJJ Kruglick, KSJ Pister - date of first publication unknown, 1995 - researchgate.net
R Yeh, EJJ Kruglick, KSJ Pister
date of first publication unknown, 1995•researchgate.netWe propose to create a class of articulated micromanipulator robots with multiple degrees of
freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a
milligram. We have created rigid links, mechanical couplings, and large-force, large-
displacement micromotors. Hollow triangular beams made from rotated microhinged
polysilicon plates can withstand axial loads of up to 2.3 gm. Mechanical couplings are used
to rotate folded structures off the substrate with less than 2µN of force. Linear electrostatic …
freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a
milligram. We have created rigid links, mechanical couplings, and large-force, large-
displacement micromotors. Hollow triangular beams made from rotated microhinged
polysilicon plates can withstand axial loads of up to 2.3 gm. Mechanical couplings are used
to rotate folded structures off the substrate with less than 2µN of force. Linear electrostatic …
Summary
We propose to create a class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram. We have created rigid links, mechanical couplings, and large-force, large-displacement micromotors. Hollow triangular beams made from rotated microhinged polysilicon plates can withstand axial loads of up to 2.3 gm. Mechanical couplings are used to rotate folded structures off the substrate with less than 2µN of force. Linear electrostatic stepper motors with an estimated force of 6.5µN at 35V and a travel of 40µm have also been demonstrated.
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