… of patterned thin films. This paper reviews this technology, termed surface micromachining,
with … Applications of surface micromachining to fabricate beams, plates, sealed cavities, and …

… the patterned oxide so that the final underetched beams are raised by steps above the …
Using this patterned thermal oxide as a sacrificial layer allows for the construction of planar …

… to achieve surface patterning of PDMS … micromachining technique is compatible with
conventional soft lithography techniques and other silicon-based surface and bulk micromachining …

… were patterned over silicon/silicon dioxide substrate using the processes combined with
bulk or surface micromachining, … Two types of techniques for precise patterning of diamond …

… demonstrated this by patterning a gear structure in an SU-8 resist layer with an aspect
ratio of 4.5. For the first time, we have shown that the laser micromachining technique has the …

… method for micron-resolution patterning of a sapphire surface … In this study, two-dimensional
array patterns on the sapphire … quickly implemented in the micromachining process, a FS …

… The laser system used for this work was a custom-built CNC micromachining workstation.
The system configuration is of fixed-beam type, where in order to generate patterned structures …

… This is the case when direct laser micromachining is applied to polydimethylsiloxane (PDMS)
[2]. Laser induced chemical modifications are inherent with the patterning process since …

… In this study, a method of direct pattern etching without the use of a resist mask … to
micromachining. In this method, the substrate is located below a thin metal stencil mask with …

… process, ultrafast laser micromachining. The unique aspects of … the as-sprayed and masked
patterns are on the order of 500 … further micromachine the thermal sprayed pattern or pattern …