… response of a micro-electro-mechanical system gas sensor under mechanical shock and
electrostatic loading. The gas sensor consists of a cantilever microbeam with a rigid microplate (…

… pressure sensor to high-g tests. They reported peculiar modes of failure under severe shock
… of capacitive inertial sensor under the effect of step and shock signals using a SDOF model. …

… , and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around
overviews of MEMS reliability in shock environments. Through the framework of these six …

… in wireless communication, environment monitoring and inertial sensing 2,3,4 . Unlike
solid-state devices such as semiconductor-based sensors and transistors, MEMS devices contain …

… Next, we calculate the shock amplitude needed to cause the G-sensor to contact the … It
is clear that without damping, a very low shock level is capable of causing the G-sensor to …

… With this philosophy in mind, we design three types of shock absorbing structures and test
their effect on the shock resilience of our MEMS harvesters. The solution leading to the best …

… in a MEMS shock sensor are presented. … shock sensor mass and latch, bounce effects, and
loss of contact between the mass and the latch. High-speed video images of the shock sensor …

… Additionally, multiple sensors were fabricated together on the same chip, so that multiple
sensors could be tested with a single shock, and the sensors could be readily used in a …

… pressure sensor to high-g tests. They reported peculiar modes of failure under severe shock
… MEMS switches or g-sensors triggered at a predetermined level of shock and acceleration. …

… Both the sensor and actuator functions with the appropriate feedback must be integrated, …
The miniaturization of sensors and subsequently that of the MEMS incorporating the sensors, …