Microprobe array structure and method for manufacturing the same
JC Chiou, CC Hung, CW Chang - US Patent 7,941,201, 2011 - Google Patents
(57) ABSTRACT A microprobe array structure with self-stabilization capabil ity and a method
for manufacturing the same are proposed. The microprobe array structure is used to sense
various bio potential signals, and is characterized in that the etching parameters are
controlled during etching to manufacture a microprobe structure with a reduced bottom cross
section So that the microprobe can be firmly stabilized in the skin tissue. Moreover, a
conducting layer is formed on the microprobe to sense signals. A design of electric isolation …
for manufacturing the same are proposed. The microprobe array structure is used to sense
various bio potential signals, and is characterized in that the etching parameters are
controlled during etching to manufacture a microprobe structure with a reduced bottom cross
section So that the microprobe can be firmly stabilized in the skin tissue. Moreover, a
conducting layer is formed on the microprobe to sense signals. A design of electric isolation …
Microprobe array structure and method for manufacturing the same
C Jin-Chern, H Chen-Chun, C Chih-Wei - 2011 - ir.lib.nycu.edu.tw
A microprobe array structure with self-stabilization capability and a method for
manufacturing the same are proposed. The microprobe array structure is used to sense
various biopotential signals, and is characterized in that the etching parameters are
controlled during etching to manufacture a microprobe structure with a reduced bottom cross
section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a
conducting layer is formed on the microprobe to sense signals. A design of electric isolation …
manufacturing the same are proposed. The microprobe array structure is used to sense
various biopotential signals, and is characterized in that the etching parameters are
controlled during etching to manufacture a microprobe structure with a reduced bottom cross
section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a
conducting layer is formed on the microprobe to sense signals. A design of electric isolation …
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