Microstructuring of silicon with femtosecond laser pulses

TH Her, RJ Finlay, C Wu, S Deliwala… - Applied Physics Letters, 1998 - pubs.aip.org
… spikes by repeatedly irradiating silicon surfaces with femtosecond laser pulses in SF6 or
Cl2… femtosecond laser pulses is in contrast to reports that femtosecond laser pulses can create …

Femtosecond-laser-assisted microstructuring of silicon surfaces

JE Carey, CH Crouch, E Mazur - Optics and Photonics News, 2003 - opg.optica.org
… a technique for microstructuring silicon surfaces with femtosecond laser pulses that … a
proof-ofprinciple experiment to demonstrate that microstructured silicon can be used for infrared …

Femtosecond laser microstructuring of materials

S Ameer-Beg, W Perrie, S Rathbone, J Wright… - Applied surface …, 1998 - Elsevier
Femtosecond laser pulses at 790 and 395 nm combined with a scanning galvo mirror … ,
fused silica and silicon (100) for microchemical applications. While Pyrex and fused silica can be …

Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties

V Zorba, N Boukos, I Zergioti, C Fotakis - Applied optics, 2008 - opg.optica.org
… properties of self-organized Si microcones fabricated using 248 nm laser pulses ( 500 fs , 5
ps … and composition of Si microstructures fabricated using ultraviolet (UV) laser pulses of the …

Evolution of silicon surface microstructures by picosecond and femtosecond laser irradiations

J Zhu, G Yin, M Zhao, D Chen, L Zhao - Applied surface science, 2005 - Elsevier
microstructure evolutions on Si surface under the irradiations of femtosecond and picosecond
laser pulses, … at these two pulse-duration regimes suggest that the laser duration plays an …

Superhydrophobic surfaces prepared by microstructuring of silicon using a femtosecond laser

T Baldacchini, JE Carey, M Zhou, E Mazur - Langmuir, 2006 - ACS Publications
… Here, we present a novel and simple structuring process that uses intense femtosecond
laser pulses to create microstructured superhydrophobic surfaces with remarkable wetting …

Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon

CH Crouch, JE Carey, JM Warrender, MJ Aziz… - Applied Physics …, 2004 - pubs.aip.org
… formed in the presence of SF6 by femtosecond laser irradiation and by nanosecond laser
laser microstructuring of silicon surfaces in the presence of SF6 with either ns or fs laser pulses

Large scale microstructuring on silicon surface in air and liquid by femtosecond laser pulses

M Ulmeanu, F Jipa, C Radu, M Enculescu… - Applied surface …, 2012 - Elsevier
… In summary, we have prepared homogeneous structures on the surface of silicon wafers
via femtosecond laser pulses irradiation scanning with dimension of 1 mm × 1 mm. The …

Direct femtosecond laser surface nano/microstructuring and its applications

AY Vorobyev, C Guo - Laser & Photonics Reviews, 2013 - Wiley Online Library
… These pH-responsive surfaces were prepared by producing the hierarchical nano/microstructured
silicon using a femtosecond laser-assisted chemical etching followed by …

Microstructuring of fused silica using femtosecond laser pulses of various wavelengths

M Pfeiffer, A Engel, G Reisse, S Weissmantel - Applied Physics A, 2015 - Springer
microstructuring system equipped with a femtosecond laser Clark-MXR CPA 2010 (1 mJ
maximum pulse energy, 1 kHz repetition rate and 150 fs pulse … for producing 3D microstructures, …