F Al-Falahi, C Beale, E Kurth, P Reinig… - MikroSystemTechnik …, 2023 - ieeexplore.ieee.org
247 天前 - Thin films of niobium pentoxide (Nb2O5) and tantalum pentoxide (Ta2O5) have
many applications in microelectronics as gate dielectrics for field-effect transistors (FETs) and …