Monoclinic optical constants, birefringence, and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry

D Schmidt, B Booso, T Hofmann, E Schubert… - Applied Physics …, 2009 - pubs.aip.org
Generalized spectroscopic ellipsometry determines the principal monoclinic optical
constants of thin films consisting of slanted titanium nanocolumns deposited by glancing
angle deposition under 85 incidence and tilted from the surface normal by 47. Form
birefringence measured for wavelengths from 500 to 1000 nm renders the Ti nanocolumns
monoclinic absorbing crystals with c-axis along the nanocolumns, b-axis parallel to the film
interface, and 67.5 monoclinic angle between the a-and c-axes. The columnar thin film …
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