We present a first step in the conception of a micro pressure source. It consists in three main
parts:(i) a heating resistance built on a dielectric membrane,(ii) air encapsulated at
atmospheric pressure and (iii) an elastomer membrane with high elastic properties. A PDMS-
based material is chosen as the membrane material for its elastic properties. When the
actuation is required, air is heated to increase its pressure; the gain in pressure produces
the deformation of the elastic membrane. Physical models have been developed for each …