Multi-probe atomic force microscopy with optical beam deflection method

E Tsunemi, N Satoh, Y Miyato… - Japanese Journal of …, 2007 - iopscience.iop.org
E Tsunemi, N Satoh, Y Miyato, K Kobayashi, K Matsushige, H Yamada
Japanese Journal of Applied Physics, 2007iopscience.iop.org
We developed a multi-probe atomic force microscope (AFM) having two AFM cantilevers
independently controlled using the optical beam deflection method. We succeeded in
simultaneously obtaining images with two independent probes by frequency modulation
(FM) detection method. To evaluate the distance between the AFM tips of the cantilevers, we
used a new the address-patterned sample, which was also developed for this study. The
images obtained show that the distance between the probes was 2 µm. The development of …
Abstract
We developed a multi-probe atomic force microscope (AFM) having two AFM cantilevers independently controlled using the optical beam deflection method. We succeeded in simultaneously obtaining images with two independent probes by frequency modulation (FM) detection method. To evaluate the distance between the AFM tips of the cantilevers, we used a new the address-patterned sample, which was also developed for this study. The images obtained show that the distance between the probes was 2 µm. The development of the multi-probe AFM opens a wide variety of applications in the present nanoscience and engineering field.
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