We present techniques for fabricating photonic crystal (PC) membrane defect lasers. These
nanostructures operate as optically pumped lasers under pulsed conditions at room
temperature. The thin membrane PC defect structures are formed by transferring an electron-
beam lithographically defined lattice pattern into an epitaxial layer structure by a sequential
process of ion beam etching, reactive ion etching, and electron cyclotron resonance etching
steps. A V-shape undercut channel is formed by a wet chemical etching using a 4: 1 mixture …