Nanopatterning by laser interference lithography: applications to optical devices

JH Seo, JH Park, SI Kim, BJ Park, Z Ma… - … of nanoscience and …, 2014 - ingentaconnect.com
JH Seo, JH Park, SI Kim, BJ Park, Z Ma, J Choi, BK Ju
Journal of nanoscience and nanotechnology, 2014ingentaconnect.com
A systematic review, covering fabrication of nanoscale patterns by laser interference
lithography (LIL) and their applications for optical devices is provided. LIL is a patterning
method. It is a simple, quick process over a large area without using a mask. LIL is a
powerful technique for the definition of large-area, nanometer-scale, periodically patterned
structures. Patterns are recorded in a light-sensitive medium that responds nonlinearly to the
intensity distribution associated with the interference of two or more coherent beams of light …
A systematic review, covering fabrication of nanoscale patterns by laser interference lithography (LIL) and their applications for optical devices is provided. LIL is a patterning method. It is a simple, quick process over a large area without using a mask. LIL is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in a light-sensitive medium that responds nonlinearly to the intensity distribution associated with the interference of two or more coherent beams of light. The photoresist patterns produced with LIL are the platform for further fabrication of nanostructures and growth of functional materials used as the building blocks for devices. Demonstration of optical and photonic devices by LIL is reviewed such as directed nanophotonics and surface plasmon resonance (SPR) or large area membrane reflectors and anti-reflectors. Perspective on future directions for LIL and emerging applications in other fields are presented.
ingentaconnect.com
以上显示的是最相近的搜索结果。 查看全部搜索结果