We show that atomic force microscope-induced oxide features can be formed reproducibly
on both Zr and ZrN surfaces, and that the growth rate decreases rapidly with increasing time.
There is an increase in oxide-feature height with humidity for both systems, and an
approximately linear dependence of the height of the structures on the applied voltage for all
films for short exposure times. As the anodization time increases, only the thinnest (6 nm)
films show a large enhancement in oxide-feature height, demonstrating the role of the …