Nanosecond, repetitively pulsed microdischarge vacuum ultraviolet source
A microdischarge is driven by short pulses (80 ns FWHM) with peak current levels up to 80
A, with a repetition frequency of 1 MHz (1 pulse/μs) allowing for∼ 550 W input power.
Experiments in pure argon (Ar 2*, 127 nm) and argon-hydrogen (Lyman-α, 121.6 nm) were
conducted. Using short pulses, the argon excimer emission was not observed. Alternatively,
Ar-H 2 operated at both higher power and efficiency (0.63%) whenever pulsed. Using Ar-H
2, the experiments result in an average generated vacuum ultraviolet power just above 3.4 …
A, with a repetition frequency of 1 MHz (1 pulse/μs) allowing for∼ 550 W input power.
Experiments in pure argon (Ar 2*, 127 nm) and argon-hydrogen (Lyman-α, 121.6 nm) were
conducted. Using short pulses, the argon excimer emission was not observed. Alternatively,
Ar-H 2 operated at both higher power and efficiency (0.63%) whenever pulsed. Using Ar-H
2, the experiments result in an average generated vacuum ultraviolet power just above 3.4 …
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