Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes
B Eminoglu, SE Alper, T Akin - 2011 16th International Solid …, 2011 - ieeexplore.ieee.org
B Eminoglu, SE Alper, T Akin
2011 16th International Solid-State Sensors, Actuators and …, 2011•ieeexplore.ieee.orgThis paper presents a novel self oscillation loop with a very simple architecture that is
independent of quality factor (Q) variations in packaged vibratory MEMS gyroscopes,
providing identical start-up performance at different ambient conditions. The new self-
oscillation loop circuitry has been fabricated in a 0.6 μm CMOS process, tested with a
fabricated MEMS gyroscope, and demonstrated start-up characteristics without any
overshoot and with a settling time of only 28msec. An angle random walk value of 0.037°/√ …
independent of quality factor (Q) variations in packaged vibratory MEMS gyroscopes,
providing identical start-up performance at different ambient conditions. The new self-
oscillation loop circuitry has been fabricated in a 0.6 μm CMOS process, tested with a
fabricated MEMS gyroscope, and demonstrated start-up characteristics without any
overshoot and with a settling time of only 28msec. An angle random walk value of 0.037°/√ …
This paper presents a novel self oscillation loop with a very simple architecture that is independent of quality factor (Q) variations in packaged vibratory MEMS gyroscopes, providing identical start-up performance at different ambient conditions. The new self-oscillation loop circuitry has been fabricated in a 0.6μm CMOS process, tested with a fabricated MEMS gyroscope, and demonstrated start-up characteristics without any overshoot and with a settling time of only 28msec. An angle random walk value of 0.037°/√hr and a bias instability value of 3°/hr are achieved using this new self-oscillation loop.
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