… The results are typical for clamped epitaxial piezoelectric thin films … platforms epitaxy on
silicon is readily available on wafer level. This will accelarate the commercial uptake of novel …

… process and actuated by a piezoelectric actuator. To achieve large … of MOEMS target
detector, turn table, guide track and target, which are set on the optical vibration isolation platform …

… Piezoelectric microelectromechanical system (MEMS) devices, fabricated by micromachining
technologies, provide a versatile platform … of piezoelectric MEMS devices. Firstly, various …

… based on optical readouts novel materials and strategies (ie, … will be focused on an MOEMS
gyroscope based on PBGs. At … In Section II, the MOEMS process has been presented, and …

… The typical gyroscope can be realized using capacitive, piezoelectric… platform have made
a lot of progress during recent years [3]; this makes the micro-opto-electro-mechanical (MOEMS…

… This work will focus on a novel design concept of quasi-static … of choice for piezoelectric
actuators in STMicroelectronics’ … In addition, improvements of the PZT process platform adopted …

… Among these devices, the MOEMS phase shifter plays an important role in the light-… actuation
methods for MOEMS mirrors that were previously proposed are thermal, piezoelectric, and …

… here is the usage of a novel material that adds degrees of … a new generation of MOEMS
called hybrid MOEMS. These have … , a technology platform for the hybrid integration of MOEMS …

… and demonstrated in making those novel sensors. In terms of … is needed in their MEMS
platform. To solve the MEMS gas … Piezoelectric MEMS energy harvester was the research topic …

… [12], and the poly-Si fabrication platforms [13]. The gap-closing and vertical comb
electrodes together with different novel transmission mechanisms are exploits to enhance the …