… the PDMS lens is integrated into the holding platform, hindering the fast auto-focusing … on
piezoelectric thin-film actuators for micro-lens. Our group has developed a novel piezoelectric …

… -length tuning, Fraunhofer IPMS developed a novel electrostatic non-resonant translational
micromirror. The combination of this device with a MOEMS grating within an external-cavity …

… selection for novel and … piezoelectric layer that is deposited as a part of the MEMS beam
between flexible (Fig. 8). When a voltage is applied to the piezoelectric layer, the piezoelectric …

… is described and a pressure-induced platform is proposed by adding a screw micrometer on
… In this study, we propose a novel microring pressure sensor based on the cantilever beam. …

… Among various actuation mechanisms for MEMS micromirrors [3], piezoelectric and
electrostatic … In this work, a novel design and its fabrication process of an electrothermally-actuated …

… concepts, procedure, and post-process flow of a robust manufacturing platform for … through
the proposed post-fabrication platform, thus realizing a novel titanium nitride composite (TiN-C…

… was established for the piezoelectric cantilever beam, and … testing on a vibration measuring
platform. Test results show that … [8] developed a MOEMS accelerometer using SOI technology…

… The sensor structure consists of a piezoelectric ZnO film deposited between two Al electrodes
on a thin silicon diaphragm. A microtunnel is fabricated in the sensor structure using novel …

… is connected with the lens holding platform through a serpentine spring. Each piezoelectric
beam is made using 2.2µm … Alnasser, “A novel low output offset voltage charge amplifier for …

… : The MEMS platforms involving electrostatic, thermal or piezoelectric actuation are commonly
… been paid to the novel thin film micro-heater due to its own several advantages: firstly, the …