… technologies, MEMS or MOEMS systems. Energy harvesting … ability to apply this novel
piezoelectric composite material on … This software is a general-purpose software platform, which …

… In general, to achieve large displacements, thermoelectric, piezoelectric, and … Thin-film
piezoelectric scanners can achieve large … This work presents a novel compact MEMS out-of-plane …

… The hybrid MOEMS device of this paper will be analyzed in two … The MEMS platform was
built by combining a suspended … Dasgupta, HE Jackson, and JT Boyd, “Novel MEMS pressure …

… The focus of this dissertation was therefore the development of Piezoelectric … of most of the
research conducted in this dissertation was novel. This makes this dissertation a valuable tool …

… have led to the birth of a novel class of devices, namely … Since most piezoelectric
micropumps use a piezoelectric plate or … has been widely used as platform for the synthesis of …

… electro-mechanical systems (MOEMS) have been developed … Piezoelectric actuators,
although fast and suitable for applications with resonators, involve the use of complex piezoelectric …

… integration methods that enable novel, highly complex device … -mechanical-systems (MOEMS)
59 have enjoyed commercial … -on or transferred to the relevant device platform. For FBAR …

… piezoelectric … piezoelectric tube with full-length quartered electrodes as shown in Fig. 1(b).
A disadvantage of the standard drive method described above is tilting of the moving platform …

Audio applications such as mobile phones, hearing aids, true wireless stereo earphones,
and Internet of Things devices demand small size, high performance, and reduced cost. …

… This MEMS mirror consists of a tiltable polysilicon platform with a … piezoelectric actuation
based on PZT (lead zirconate titanate). … In this paper, we present a novel electrostatically driven …