Digital asynchronous phase locked loop for precision control of MOEMS scanning mirror

D Brunner, HW Yoo, G Schitter - IFAC-PapersOnLine, 2019 - Elsevier
… Abstract: Accurate phase detection and control of nonlinear resonant MOEMS mirrors are …
a novel digital PLL that uses an asynchronous logic for high precision driving of the MOEMS

CloudMEMS Platform for Design and Simulation of MEMS: Physics Modules & End-to-End Testing

MD Voyantzis - 2018 - rave.ohiolink.edu
… In this thesis a novel web-based platform for MEMS design is presented. This platform makes
… interface was included in the CloudMEMS platform to allow for simulation of piezoelectric

Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview

MA Fraga, H Furlan, RS Pessoa, M Massi - Microsystem technologies, 2014 - Springer
… SiC thin films in piezoelectric and piezoresistive MEMS sensors. Emphasis is placed on the
influence of the temperature on the piezoelectric and piezoresistive properties of these films. …

Fabrication and characterisation of piezoelectric screen-printed in plane resonant microcantilevers used as gravimetric sensors

S Grall, I Dufour, V Aubry… - Smart Materials and …, 2019 - iopscience.iop.org
… It demonstrates novel alternatives in printing processes, … 3 is mounted on the printing platform
and connected with silver … mass detection DTIP of MEMS and MOEMS—Symp. on Design, …

A novel optical waveguide microcantilever sensor for the detection of nanomechanical forces

K Zinoviev, C Dominguez, JA Plaza… - Journal of Lightwave …, 2006 - opg.optica.org
This study presents a novel generic multipurpose probe based on an array of 20 waveguide
channels with microcantilevers acting as optical waveguides operated in the visible range. …

MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing

J Iannacci, E Serra, G Sordo, M Bonaldi… - Microsystem …, 2018 - Springer
… a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within
the technology platform … authors, exploits the piezoelectric effect to convert environmental …

Piezoelectric beam for intrabody propulsion controlled by embedded sensing

A Abadi, G Kosa - IEEE/ASME Transactions on Mechatronics, 2016 - ieeexplore.ieee.org
… We developed a piezoelectric actuator for propelling a microrobot in cerebro spinal fluid or
… The SI and the control method are tested in a novel piezoelectric microswimmer in Section …

Vibrational energy harvesting

L Larcher, S Roy, D Mallick, P Podder… - Beyond‐CMOS …, 2014 - Wiley Online Library
… PZT epitaxial thin film on a silicon platform exhibiting a power of 13 μW at a resonance …
A novel hybrid energy harvester integrated using both piezoelectric and electromagnetic …

A MIXED PIEZOELECTRIC AND ELECTROMAGNETIC ACTUATION DEVICE FOR DRY AND WET MANIPULATION.

A Ivan, M Ardeleanu, I Lungu, V Gurgu… - … Mechanics, Optics & …, 2015 - search.ebscohost.com
The paper presents the design, characterization and further micro-manipulation demonstration
of a four-DoF (Degrees of Freedom) micro-gripper based on piezoelectric and on …

Nanomembrane: A new MEMS/NEMS building block

J Matovic, Z Jakšić - Micro Electronic and Mechanical Systems, 2009 - books.google.com
… in various bio/chemical sensors, microsleeves and MOEMS devices as eg micromirrors. …
imparting them novel functionalities one could hardly expect that many exciting novel findings …