… In this paper, a piezoelectric microgripper for arbitrary 2D trajectory is proposed. The … structure
was obtained by an electrical voltage supplied to piezoelectric plates. In order to verify the …

… , which is the MOEMS device used throughout this thesis. We show that when MOEMS are
used … In addition, we demonstrate how MOEMS allow us to perform image processing tasks in …

A novel sensitive piezoelectric mass balance (PEMB) was developed for using in weightless
environment. The mass of the measured object was obtained by detecting the resonant …

… This paper reviews the state-of-the-art of wafer-level heterogeneous integration technologies
and platforms suitable for MOEMS, MEMS, and NEMS devices. Heterogeneous integration …

… MOEMS use rings/ disks/spheres or can potentially use them. Ring-based MOEMS share
many common parts with other MOEMS … Hence, a review of MOEMS with a focus on rings/disks/…

… amplification mechanisms for piezoelectric-based systems … piezoelectric-based systems
toward selecting suitable designs for potential aerospace applications and an outlook for novel …

… single platform. This paper presents a review of recent developments in AlNbased piezoelectric
devices … In terms of innovation, a novel artificial basilar membrane using a MEMS-based …

… We now present a novel controller structure for the micro scanning mirror systems, that uses
an exact feedforward linearization and the PID-like PID k -controller to stabilize the system …

… modes considered for the supporting platform, in order to avoid … the two modes of vibration
of the platform. For this estimation, … -supporting platform, the legs and the piezoelectric patches …

… In piezoelectric mirrors, the issues are the integration of the piezo material in the fabrication
… with piezoelectric actuators. Holmstrom et al. presented a comprehensive review of MOEMS-…