Development and investigation of high resolution resonant pressure sensor with optical interrogation

M Jozwik, C Gorecki, A Sabac, D Heinis… - Optical …, 2005 - spiedigitallibrary.org
… In this paper we present a new family of MOEMS device, … , as a vibrating membrane, gives
novel possibility of detection and … Józwik, „Multifunctional interferometric platform for on-chip …

Recent advances in nano-opto-electro-mechanical systems

N Xu, ZD Cheng, JD Tang, XM Lv, T Li, ML Guo… - …, 2021 - degruyter.com
… technology provides a platform for conducting quantum optical … In this chapter, we will
explore the novel applications of … cavity piezoelectric optomechanical platform, piezoelectric-…

Simulation and experimental demonstration of improved efficiency in coupled piezoelectric cantilevers by extended strain distribution

LGH Staaf, E Köhler, D Parthasarathy… - Sensors and actuators A …, 2015 - Elsevier
… to use virtual platforms as pedagogic support and to implement new platforms. From 2008 till
… His research focus on combining MEMS/NEMS with other sciences in novel dedicated and …

Control of a novel MEMS Fast Steering Mirror with improved quasi-static performance

Y Zihao, W Lihao, W Yang, Z Yonggui, L Yichen… - IEEE …, 2023 - ieeexplore.ieee.org
… The hysteresis is a difficulty for piezoelectric ceramic FSM control, … require few resources
of satellite platform. MEMS FSMs for this … His research interests include MOEMS systems and …

Micro-opto-electro-mechanical gyroscope based on the Talbot effect of a single-layer near-field diffraction grating

K Xie, R Zhang, C Xin, L Jin, Z Wang, Z Wang, M Li… - Applied Optics, 2021 - opg.optica.org
… a novel, to the best of our knowledge, micro-opto-electro-mechanical system (MOEMS) …
We would like to acknowledge the support from the nanofabrication common platform of …

Electrical aging of a piezoelectric MEMS fast steering mirror and its impact on reliability

W Zhu, Y Su, S Gao, X Li, Y Zhang, L Wang… - Sensors and Actuators A …, 2024 - Elsevier
… Typically, the vibration frequency of the satellite platform that can affect the laser communication
link is … His research interests include MOEMS systems and advanced optical sensors. …

A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

Y Zhu, W Liu, K Jia, W Liao, H Xie - Sensors and Actuators A: Physical, 2011 - Elsevier
… The novel LSF piezoelectric actuator design and working … In order to keep the platform
parallel to the substrate surface and … His research interests include MOEMS Component for …

A multi-directional broadband piezoelectric-electromagnetic-magnetic coupling compound energy harvester for vibration energy harvesting applications

M Gao, Y Zhu, D Li, H Liu, Q Guo - Smart Materials and …, 2023 - iopscience.iop.org
… and proposed various novel structures. Yang et al [29] proposed a novel piezoelectric–electromagnetic
hybrid energy harvester consisting of a piezoelectric cantilever coated with PZT …

Energy harvesting from knee motion using piezoelectric patch transducers

M Beyaz - Academic Platform-Journal of Engineering and …, 2019 - dergipark.org.tr
… Taking advantage of two bending sites simultaneously is one of the main novel design
features that distinguishes this work from others in the literature. A schematic drawing of the …

1.05-GHz CMOS oscillator based on lateral-field-excited piezoelectric AlN contour-mode MEMS resonators

C Zuo, J Van der Spiegel… - IEEE transactions on …, 2009 - ieeexplore.ieee.org
… a unique feature of this novel circuit topology and will … piezoelectric micro and nano systems
(MEMs/nEMs) for rF wireless communications, biological detection, wireless sensor platforms