The fast‐moving world of MEMS technology

R Bogue - Assembly Automation, 2009 - emerald.com
… Strictly speaking, DLPs are examples of MOEMS technology … section concentrates on a
novel but rapidly developing field: … gas turbine engine and a piezoelectric converter. Relying on …

A low-voltage, low-current, digital-driven MEMS mirror for low-power LiDAR

D Wang, L Thomas, S Koppal, Y Ding… - IEEE Sensors …, 2020 - ieeexplore.ieee.org
… , through billions of tiny smart platforms. These are micro platforms that will appear in a variety
of … Light detection and ranging sensors (LiDAR) can contribute to novel compact and low …

Meandering-trapezoidal shaped MEMS structure for low frequency vibration based energy harvesting applications

B Debnath, R Kumar, PM Shakeel - Sustainable Energy Technologies and …, 2020 - Elsevier
… The prompt evolution of less power consumable mobile electronic platforms and wireless …
In this paper, a small sized novel design of Meandering-Trapezoidal shaped piezoelectric

Exploration and Realization of Novel High-Q Bulk Modes Using Support Transducer Topology

G Pillai, SS Li - Journal of Microelectromechanical Systems, 2021 - ieeexplore.ieee.org
… The removal of the piezoelectric transducer layer from the … match between the thin film
piezoelectric on substrate (TPoS) … using the PiezoMUMPS platform provided by MEMSCAP [15]. …

A photoacoustic imaging device using piezoelectric micromachined ultrasound transducers (PMUTs)

A Dangi, CY Cheng, S Agrawal, S Tiwari… - IEEE transactions on …, 2019 - ieeexplore.ieee.org
… Third, since ultrasound and PAI share the same detection platform, conventional ultrasound
… imaging, MEMS/MOEMS sensors, piezoelectric micromachined ultrasound transducers (…

Modeling and process design optimization of a piezoelectric micromachined ultrasonic transducers (PMUT) using lumped elements parameters

AB Amar, H Cao, AB Kouki - Microsystem Technologies, 2017 - Springer
… a novel design process of a piezoelectric micromachined … for thin-film piezoelectric devices
defining PMUT performance … A unimorph PMUT disk formed by a piezoelectric lead zirconate …

[HTML][HTML] Design of a compliant mechanism based four-stage amplification piezoelectric-driven asymmetric microgripper

X Chen, Z Deng, S Hu, J Gao, X Gao - Micromachines, 2019 - mdpi.com
… In order to eliminate the external interference as much as possible, all the devices were
installed on the high performance vibration isolation platform (ZPT-GM, zh-gezhen, Wuhan, …

Research on a locking device for power-off locking and 2-DOF backward motion suppression of a piezoelectric platform

Q Chang, J Deng, Y Liu, S Zhang… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
… A novel locking device is developed in this article, which can be embedded in a
piezoelectric inertial rotary platform and achieved the functions of power-off locking and 2-DOF …

Microoptoelectromechanical system fluorescence biosensor

JFJ Lo - 2007 - search.proquest.com
… and is characterized with a novel setup based on Gaussian beam … actuator provides a tunable
platform to conduct optical … system is the Piezoelectric MOEMS Grating Actuator. It is also …

Distributed intelligence using gallium nitride based active devices

P Ramesh, S Krishnamoorthy, PS Park… - Active and Passive …, 2010 - spiedigitallibrary.org
… of MOEMS structures that are rather difficult to create using conventional methods. Novel
of the more recent ones being on the GaN platform. A key issue encountered by all the GaN …