atomization of fluids has been implemented. The design and characterization of 485 kHz
microfabricated silicon-based ultrasonic nozzles are presented for the concept of economic
energy development. Each nozzle is composed of a silicon resonator and a piezoelectric
drive section consisting of three Fourier horns. The required minimum energy to atomize
liquid droplets is verified by COMSOL Multiphysics simulation software to clarify …