Numerical study of the electron dynamics in radio-frequency plasmas at atmospheric pressure

T Hemke, M Gebhardt, A Wollny… - 2011 Abstracts IEEE …, 2011 - ieeexplore.ieee.org
T Hemke, M Gebhardt, A Wollny, RP Brinkmann, T Mussenbrock
2011 Abstracts IEEE International Conference on Plasma Science, 2011ieeexplore.ieee.org
Summary form only given. The dynamics of electrons plays an important role for the
behavior of radio-frequency driven discharges, particularly at high pressures. The electron
dynamics itself is highly driven by the dynamics of the plasma boundary sheath. In this work
we study a radio-frequency driven atmospheric pressure plasma jet which is frequently
employed as an efficient plasma sources for surface modification. We concentrate on
secondary electron effects and excitation mechanisms in Helium/Oxygen mixtures by means …
Summary form only given. The dynamics of electrons plays an important role for the behavior of radio-frequency driven discharges, particularly at high pressures. The electron dynamics itself is highly driven by the dynamics of the plasma boundary sheath. In this work we study a radio-frequency driven atmospheric pressure plasma jet which is frequently employed as an efficient plasma sources for surface modification. We concentrate on secondary electron effects and excitation mechanisms in Helium/Oxygen mixtures by means of self-consistent plasma simulations.
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