Ohmic graphite-metal contacts on oxygen-terminated lightly boron-doped CVD monocrystalline diamond
A process to obtain ohmic contacts on oxygen-terminated lightly boron-doped CVD
monocrystalline diamond films was developed. Samples were contacted by Ti/Au metallic
pads in the transmission line model (TLM) configuration. The electric contacts were placed
onto a mesa structure produced on the CVD boron-doped layer. One of the samples was
additionally implanted with helium ions at 10 keV in order to induce the formation of a
graphitic layer underneath the diamond surface before contacting so as to improve electrical …
monocrystalline diamond films was developed. Samples were contacted by Ti/Au metallic
pads in the transmission line model (TLM) configuration. The electric contacts were placed
onto a mesa structure produced on the CVD boron-doped layer. One of the samples was
additionally implanted with helium ions at 10 keV in order to induce the formation of a
graphitic layer underneath the diamond surface before contacting so as to improve electrical …
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