On-chip diode temperature sensors on InP-based generic foundry platform
2023 Opto-Electronics and Communications Conference (OECC), 2023•ieeexplore.ieee.org
… Abstract—We developed two types of diode temperature sensors on the InP-based generic
foundry platform, with no process adaptations required. These … In this paper, we present two
types of monolithic diode temperature sensors based on two standard building blocks, one
with a multi-quantum well (MQW) layer stack and the other with a bulk InGaAsP quaternary
layer stack (Q1.25), both available in the InP-based generic photonic integration technology
[10], [11]. The temperature was measured directly by detecting the change in the forward bias …
foundry platform, with no process adaptations required. These … In this paper, we present two
types of monolithic diode temperature sensors based on two standard building blocks, one
with a multi-quantum well (MQW) layer stack and the other with a bulk InGaAsP quaternary
layer stack (Q1.25), both available in the InP-based generic photonic integration technology
[10], [11]. The temperature was measured directly by detecting the change in the forward bias …
We developed two types of diode temperature sensors on the InP-based generic foundry platform, with no process adaptations required. These sensors showed sensitivity from -1.1 to - 2.1 mV/K and were not affected by on-chip light.
ieeexplore.ieee.org
以上显示的是最相近的搜索结果。 查看全部搜索结果