polarimetry. The micropolarizers are designed for operation in the 1.5-5.0 μm band with a
specially designed thin SiO_2 layer between the silicon substrate and the wiregrids to
improve the performance at the shorter wavelengths. Deep-UV projection lithography is
used to fabricate 140-nm-deep wiregrids with a 400 nm period. The extinction ratio and the
transmission coefficient are measured with a tunable IR laser. A TM transmission coefficient …