Optical characterization of wiregrid micropolarizers designed for infrared imaging polarimetry

Z Wu, PE Powers, AM Sarangan, Q Zhan - Optics letters, 2008 - opg.optica.org
Z Wu, PE Powers, AM Sarangan, Q Zhan
Optics letters, 2008opg.optica.org
We report the optical characterization of a metal wiregrid micropolarizer array for IR imaging
polarimetry. The micropolarizers are designed for operation in the 1.5-5.0 μm band with a
specially designed thin SiO_2 layer between the silicon substrate and the wiregrids to
improve the performance at the shorter wavelengths. Deep-UV projection lithography is
used to fabricate 140-nm-deep wiregrids with a 400 nm period. The extinction ratio and the
transmission coefficient are measured with a tunable IR laser. A TM transmission coefficient …
We report the optical characterization of a metal wiregrid micropolarizer array for IR imaging polarimetry. The micropolarizers are designed for operation in the 1.5-5.0 μm band with a specially designed thin SiO_2 layer between the silicon substrate and the wiregrids to improve the performance at the shorter wavelengths. Deep-UV projection lithography is used to fabricate 140-nm-deep wiregrids with a 400 nm period. The extinction ratio and the transmission coefficient are measured with a tunable IR laser. A TM transmission coefficient greater than 70% with an extinction ratio greater than 10^4 is achieved for the midwave-IR region while maintaining an extinction ratio better than 10^2 for the near-IR region above 1.5 μm.
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