Orientation–free and differentially pumped addition of a low-flux reactive gas beam to a surface analysis system

C Harthcock, A Jahanbekam, JR Eskelsen… - Review of Scientific …, 2016 - pubs.aip.org
We describe an example of a piecewise gas chamber that can be customized to incorporate
a low flux of gas-phase radicals with an existing surface analysis chamber for in situ and
stepwise gas-surface interaction experiments without any constraint in orientation. The
piecewise nature of this gas chamber provides complete angular freedom and easy
alignment and does not require any modification of the existing surface analysis chamber. In
addition, the entire gas-surface system is readily differentially pumped with the surface …
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