Silicon heterojunction solar cell fabrication incorporates a significant amount of hydrogen
into the silicon wafer bulk, and the amount of injected hydrogen is comparable to that
introduced by silicon nitride films during a high-temperature firing step. In this work, the
origins of the hydrogen injected during heterojunction cell processing have been identified.
We demonstrate that the hydrogen plasma treatment that is routinely included to improve
surface passivation considerably increases the hydrogen concentration in the wafers. We …