We propose a planar technology for fabrication and surface modification of disposable,
polymeric, microfluidic devices, and show applications in cell patterning. By planar
technology we mean lithography directly on a polymeric plate followed by plasma etching of
the plate. In this context, we developed lithographic processes directly on the polymeric
substrate, employing easily strippable photoresists, for which stripping is performed without
attacking the polymeric substrate. We then applied oxygen plasma etching to transfer the …