generation MEMS. We demonstrate on-chip optical transduction of a piezoMEMS structure.
We use a heterogeneous 3D-bonding approach to integrate silicon photonics interrogator
chip and lead-zirconate-titanate (PZT)-based MEMS device. We report on-chip
measurements of three resonance modes of the PiezoMEMS beam that shows an excellent
agreement with conventional laser Doppler vibrometer measurement. We also demonstrate …