Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform

P Gothoskar, M Ghiron, V Patel… - US Patent …, 2005 - Google Patents
A photodetector for use with relatively thin (ie, Sub micron) Silicon optical waveguides
formed in a silicon-on insulator (SOI) structure comprises a layer of poly germanium
disposed to couple at least a portion of the optical Signal propagating along the Silicon
optical waveguide. Tight confinement of the optical signal within the waveguide Structure
allows for efficient evanescent coupling into the poly-germanium detector. The Silicon
optical waveguide may comprise any desired geometry, with the poly-germanium detector …
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