Polyloaded optical waveguide devices and methods for making same

S Delwala - US Patent 6,891,985, 2005 - Google Patents
A passive optical waveguide device deposited on a wafer that includes an insulator layer
and an upper Semiconductor layer formed at least in part from Silicon. The upper Silicon
layer forms at least part of an optical waveguide, Such as a Slab waveguide. The passive
optical waveguide device includes an optical waveguide, a gate oxide, and a polysili con
layer. The polysilicon layer projects a region of Static effective mode indeX within the optical
waveguide having a different effective mode indeX than the optical waveguide outside of the …