… MEMS may change this model. We propose herein a new class of MEMS devices, power
MEMS, characterized by thermal, electrical, and mechanical power densities equivalent to …

… Films also play an important role in the electrical aspect of the microengine. Conversion
of mechanical power to electrical power for power generation, and vice versa for starting the …

… at the University of Birmingham to develop microengines to replace batteries. The project …
power into mechanical power. Mechanical power is then converted into electrical power …

… , power densities in excess of 1500 MW/m3 and efficiencies over 90% are possible within
the microengine … This work is part of the MIT Microengine Project and has been financially …

… cross section of the MIT microengine - a complete gas turbine … approximately lo-20W of
electrical power. An SEM of the turbine … Microengineering will enable smaller, lowerpower, and …

… is developing a MEMS-based gas turbine power generator with … research in MEMS-based
microscale power generation and is … The fabrication of two MEMS-based microengines, one …

… consumption, and air flow rate in later designs with recuperators to realize microengines
with power outputs of as much as 50-100 W, power specific fuel consumption of 0.3-0.4 g/w-hr, …

… (MEMS) may change this model. We propose herein a new class of MEMS devices, MEMS
power systems or power MEMS, characterized by thermal, electrical, and mechanical power …

… This paper reviews work on MEMS gas turbine engines for propulsion and power production…
to realize microengines with power outputs of as much as 50–100 W, power specific fuel …

… fabrication technologies to construct compact electric power … As part of the MIT Microengine
project, we are investigating … systems for use in high speed rotating MEMS devices. The …