This thesis, for the first time in the literature, presents the effect of quadrature error
compensation on the performance of a fully decoupled MEMS gyroscope and provides
experimental data on the sources of quadrature error. Dedicated quadrature error
cancellation electrodes operating with only differential DC potentials are designed.
Gyroscopes with intentionally placed imperfections are fabricated with SOG based SOI
process which provides higher yield and uniformity compared to SOG process. Tests show …

This paper presents experimental data about the sources of the quadrature error in a fully
decoupled microelectromechanical systems gyroscope and demonstrates the extent of
performance improvement by the cancellation of this error. Quadrature sources including
mass, electrostatic-force, and mechanical-spring imbalances have been compared by FEM
simulations, and spring imbalance has been found as the dominant source of the quadrature
error. Gyroscopes have been designed with intentional spring imbalances and fabricated …