… resonator cantilevers were implemented using the dielectric layer rather than the copper layers.
Mechanical resonators … used to achieve integrated CMOSMEMS resonators in this work. (…

… polymer, a capacitive CMOS-MEMS resonator with a 25 nm … silicon, such a CMOS-MEMS
resonator possesses a sufficient Q … , a multiuser multichip SOI CMOS-MEMS process has been …

… In this review, the CMOS–MEMS or intra-CMOS resonators are classified according to the …
self-excite an array of four cantilevers. The cantilevers resonance frequency is 250 kHz with an …

… of the resonator in the case of the cantilever, because one needs two contacts to the
cantilever. Piezoresistive readout has been demonstrated for Si based AFM cantilevers [35], [36]. …

… In contrast to previously presented CMOS MEMS resonators, our design either
completely avoids employing narrow gaps (arch bridges) or at least has the gap protected (hidden …

… built on AMS 0.35 μm have already been reported: metal cantilevers with 6 MHz resonance
… This work demonstrates that the proposed fabrication process for monolythic CMOS–MEMS …

… Cantilever and fixed-fixed resonator topologies are designed in order to test for air damping
… The cantilever tuning fork shows a decrease in damping by 67% over a single cantilever and …

… RF signals as high as 3.2 GHz. Further, we show integration of CMOSMEMS resonators …
response at IO mTorr vacuum shows that the cantilever has a primary resonance atjb = 435 kHz …

… Interestingly, the vibrating RF MEMS resonator can also be … actuation capacitor of the ohmic
cantilever RF MEMS switch). … vertical oxide etch of the CMOS-MEMS process. c MMICs are …

… of published CMOS-MEMS platforms based on … cantilever resonator test keys using an
optical interferometer. The worst-case ROC of 1.61 mm is obtained with a bimorph-like cantilever …