Rayleigh scattering, mode coupling, and optical loss in silicon microdisks
High refractive index contrast optical microdisk resonators fabricated from silicon-on-
insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale
optical probe. Measurements performed in the 1500 nm wavelength band show that these
silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×
10 5, limited by Rayleigh scattering from fabrication induced surface roughness.
Microdisks with radii as small as 2.5 μ m are studied, with measured quality factors as high …
insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale
optical probe. Measurements performed in the 1500 nm wavelength band show that these
silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×
10 5, limited by Rayleigh scattering from fabrication induced surface roughness.
Microdisks with radii as small as 2.5 μ m are studied, with measured quality factors as high …
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