Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation
CJ Chen, J Zheng, T Gu, JF McMillan, M Yu, GQ Lo… - Optics express, 2011 - opg.optica.org
Optics express, 2011•opg.optica.org
We examine the cavity resonance tuning of high-Q silicon photonic crystal heterostructures
by localized laser-assisted thermal oxidation using a 532 nm continuous wave laser focused
to a 2.5 μm radius spot-size. The total shift is consistent with the parabolic rate law. A tuning
range of up to 8.7 nm is achieved with∼ 30 mW laser powers. Over this tuning range, the
cavity Qs decreases from 3.2× 10^ 5 to 1.2× 10^ 5. Numerical simulations model the
temperature distributions in the silicon photonic crystal membrane and the cavity resonance …
by localized laser-assisted thermal oxidation using a 532 nm continuous wave laser focused
to a 2.5 μm radius spot-size. The total shift is consistent with the parabolic rate law. A tuning
range of up to 8.7 nm is achieved with∼ 30 mW laser powers. Over this tuning range, the
cavity Qs decreases from 3.2× 10^ 5 to 1.2× 10^ 5. Numerical simulations model the
temperature distributions in the silicon photonic crystal membrane and the cavity resonance …
We examine the cavity resonance tuning of high-Q silicon photonic crystal heterostructures by localized laser-assisted thermal oxidation using a 532 nm continuous wave laser focused to a 2.5 μm radius spot-size. The total shift is consistent with the parabolic rate law. A tuning range of up to 8.7 nm is achieved with ∼ 30 mW laser powers. Over this tuning range, the cavity Qs decreases from 3.2×10^5 to 1.2×10^5. Numerical simulations model the temperature distributions in the silicon photonic crystal membrane and the cavity resonance shift from oxidation.
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