Quantum IR photodetectors are expensive and require cooling, and exotic and toxic
materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower
and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon
membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We
present the fabrication of these devices, electro-thermal characterization results, and …