Silicon based nano-thermoelectric bolometers for infrared detection

A Varpula, K Grigoras, K Tappura, AV Timofeev… - Proceedings, 2018 - mdpi.com
A Varpula, K Grigoras, K Tappura, AV Timofeev, A Shchepetov, J Hassel, J Ahopelto…
Proceedings, 2018mdpi.com
The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers.
Quantum IR photodetectors are expensive and require cooling, and exotic and toxic
materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower
and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon
membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We
present the fabrication of these devices, electro-thermal characterization results, and …
The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.
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