Single and double diffusion breaks on integrated circuit products comprised of FinFET devices

R Xie, KY Lim, MG Sung, RRH Kim - US Patent 9,865,704, 2018 - Google Patents
One illustrative integrated circuit product disclosed herein includes, among other things, a
plurality of FinFET devices, each of which comprises a gate structure comprising a high-k
gate insulation material and at least one layer of metal, a single diffusion break (SDB)
isolation structure positioned in a first trench defined in a semiconductor substrate between
first and second active regions, the SDB isolation structure comprising the high-k insulating
material and the at least one layer of metal, and a double diffusion break (DDB) isolation …
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