Structural and optical characterization of ezo thin film for application in optical waveguide

L Agarwal, R Singh, S Tripathi - Advances in VLSI, Communication, and …, 2021 - Springer
Advances in VLSI, Communication, and Signal Processing: Select Proceedings of …, 2021Springer
In the present paper, we report the growth of high-quality erbium-doped ZnO (EZO) thin films
on n-silicon substrate. The deposited film may prove to be a capable material for use in
optical waveguide due to high FSR and quality factor. The low-cost sol-gel spin coating
method has been utilized to prepare the EZO thin film. The X-ray diffraction (XRD) result of
the film exhibits single-crystalline nature of the film with (101) as the dominant orientation. In
order to find the aptness of EZO thin film for application in waveguide, the ellipsometry …
Abstract
In the present paper, we report the growth of high-quality erbium-doped ZnO (EZO) thin films on n-silicon substrate. The deposited film may prove to be a capable material for use in optical waveguide due to high FSR and quality factor. The low-cost sol-gel spin coating method has been utilized to prepare the EZO thin film. The X-ray diffraction (XRD) result of the film exhibits single-crystalline nature of the film with (101) as the dominant orientation. In order to find the aptness of EZO thin film for application in waveguide, the ellipsometry measurement has been carried out to evaluate the optical parameters of EZO thin film. The reflectivity of EZO thin film in the visible region make it as a material of choice to use it as a transmitter in optical waveguide.
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