on n-silicon substrate. The deposited film may prove to be a capable material for use in
optical waveguide due to high FSR and quality factor. The low-cost sol-gel spin coating
method has been utilized to prepare the EZO thin film. The X-ray diffraction (XRD) result of
the film exhibits single-crystalline nature of the film with (101) as the dominant orientation. In
order to find the aptness of EZO thin film for application in waveguide, the ellipsometry …