High sensitivity gas sensors are typically realized using metal catalysts and nanostructured
materials, utilizing non-conventional synthesis and processing techniques, incompatible
with on-chip integration of sensor arrays. In this work, we report a new device architecture,
suspended core-shell Pt-PtOx nanostructure that is fully CMOS-compatible. The device
consists of a metal gate core, embedded within a partially suspended semiconductor shell
with source and drain contacts in the anchored region. The reduced work function in …