Optical grating components and methods of forming are provided. In some embodiments, a
method includes providing an optical grating layer, and forming an optical grating in the
optical grating layer, wherein the optical grating comprises a plurality of angled trenches
disposed at a non-zero angle of inclination with respect to a perpendicular to a plane of the
optical grating layer. The method may further include delivering light from a light source into
the optical grating layer, and measuring at least one of: an undiffracted portion of the light …