Testing philosophy behind the micro analysis system
HG Kerkhoff - Design, Test, and Microfabrication of MEMS and …, 1999 - spiedigitallibrary.org
Design, Test, and Microfabrication of MEMS and MOEMS, 1999•spiedigitallibrary.org
Microsystem testing has to cope with many problems, resulting from inaccessibility, different
technologies and non-electrical failure modes. Possible test techniques have been
investigated to test a new advanced microsystem. The implementation form and application
area highly contributes to the choices made.
technologies and non-electrical failure modes. Possible test techniques have been
investigated to test a new advanced microsystem. The implementation form and application
area highly contributes to the choices made.
Microsystem testing has to cope with many problems, resulting from inaccessibility, different technologies and non-electrical failure modes. Possible test techniques have been investigated to test a new advanced microsystem. The implementation form and application area highly contributes to the choices made.
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