The challenge of learning science during the COVID-19 pandemic in elementary schools focuses on the need for digital learning materials for Science Process Skills (SPS) through the perspective of science as an investigation process. This study aims to investigate the influence of interactive digital worksheets based on level of inquiry towards science process skills during the covid-19 pandemic in elementary school. This study uses quasi-experiments research with pretest-posttest control groups design. The sample used was 124 fifth grade elementary school students. Data collection uses the SPS test through measurement indicators of observation, classifying, communication, measuring, inference, and prediction aspects. Data analysis using independent sample t-test after going through the assumption test of normality, homogeneity and balance. The results of calculating the hypothesis test obtained p= 0.000 at a significance level of 5% indicating that there is a difference between IDW and student SPS. The effect size test was obtained by a percentage of 66.18% so that it can be concluded that the use of IDW based on LoI can effectively increase SPS in elementary school students. Interactive facilities and ease of access as well as the suitability of work stages based on the LoI contribute to student independence and stimulate student SPS in elementary schools during learning during the pandemic.