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The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

I Korolov, A Derzsi, Z Donkó, J Schulze - Applied Physics Letters, 2013 - pubs.aip.org
In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive
harmonics, a dc self-bias can be generated as a function of the phase shift between the
driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary
Electron Asymmetry Effect (SEAE) was discovered (Lafleur et al., J. Phys. D: Appl. Phys. 46,
135201 (2013)): unequal secondary electron emission coefficients at both electrodes were
found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate …
被引用次数：54 相关文章 所有 12 个版本

The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas

J Schulze, E Schuengel, I Korolov… - 2014 IEEE 41st …, 2014 - ieeexplore.ieee.org
Summary form only given. In geometrically symmetric capacitive radio-frequency plasmas
driven by two consecutive harmonics a dc self-bias can be generated as a function of the
phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE)[1].
Recently the Secondary Electron Asymmetry Effect (SEAE) was discovered (T. Lafleur, P.
Chabert and JP Booth J. Phys. D: Appl. Phys. 46 135201 (2013)): unequal secondary
electron emission coefficients at both electrodes were found to induce an asymmetry in …
相关文章 所有 5 个版本
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