Poly-carbonate films containing different types of original surface roughness were
illuminated by a polarized ArF excimer laser beam having a fluence of 4 mJ/cm2. Atomic
force microscopy was applied to study the laser-induced periodic surface structure formation
process at 0°, 30° and 45° angles of incidence. The effect of initial surface structures on the
intensity distribution was investigated in cases of:(a) grains on oriented and amorphous thick
films;(b) holes on thin spin-coated films; and (c) nanoparticles arranged along micrometer …