Thermally stable nanoporous organosilicate thin films were realized by the microphase
separation of pore-generating polymers mixed with an organosilicate matrix to be
antireflective coatings (ARCs), for which a thin film with a refractive index (n) of 1.23 for zero
reflection is required. The refractive index of such nanoporous organosilicate films can be
tuned from 1.39 down to 1.23 by incorporating nanopores within the films. With a
nanoporous single layer with n∼ 1.23, the light transmittance of the glass above 99.8% was …

Nanoporous organosilicate thin films were realized by the microphase separation of pore
generating components mixed with an organosilicate matrix. The refractive index of such
nanoporous organosilicate films can be tuned in the range of $1.40 {\sim} 1.22$. With a
nanoporous single layer with n ${\sim} 1.225,\; 99.85\;% $ transmittance in the visible range
was achieved. In order to overcome the limitation on the narrow wavelength for high
transmittance imposed by single nanoporous thin films, bilayer thin films with different …