Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers,
often using atomic layer deposition compatible precursors. By exposing a polymer to an
organo-metallic precursor, area selective material formation is achieved where the precursor
reacts with regions covered by an infiltration-receptive polymer brush. Combining receptive
and rejecting polymers that have the capability of forming complex nanopatterns could
potentially allow for the creation of nanofeatures, offering a route to area selective …